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1

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Optical Microlithography XX - ARC stack development for hyper-NA imaging

Farys, Vincent, Flagello, Donis G., Warrick, Scott, Chaton, Catherine, Chapon, Jean-Damien

Year:

2007

Language:

english

File:

PDF, 458 KB

english, 2007

2

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Metrology, Inspection, and Process Control for Microlithography XXIV - Improved CD control for 45-40 nm CMOS logic patterning: anticipation for 32-28 nm

Le Gratiet, Bertrand, Raymond, Christopher J., Sundermann, Frank, Massin, Jean, Decaux, Marianne, Thivolle, Nicolas, Baron, Fabrice, Ostrovsky, Alain, Monget, Cedric, Chapon, Jean Damien, Blancquaert,

Year:

2010

Language:

english

File:

PDF, 1017 KB

english, 2010

3

[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Convergence towards large perimeter overlay Run-to-Run using multivariate APC system

Duclaux, Benjamin, Pelletier, Alice, De-Caunes, Jean, Perrier, Robin, Babaud, Laurene, Gatefait, Maxime, Fagart, Olivier, Thivolle, Nicolas, Guerabsi, Mathieu, Chapon, Jean-Damien, Perrin, Bruno, Mong

Year:

2019

Language:

english

File:

PDF, 1.20 MB

english, 2019

4

The Impact of ISM Turbulence, Clustered Star Formation and Feedback on Galaxy Mass Assembly through Cold Flows and Mergers

Powell, Leila C., Bournaud, Frederic, Chapon, Damien, Devriendt, Julien, Slyz, Adrianne, Teyssier, Romain

Journal:

Proceedings of the International Astronomical Union

Year:

2010

Language:

english

File:

PDF, 137 KB

english, 2010

5

Star formation in galaxy mergers: ISM turbulence, dense gas excess, and scaling relations for disks and starbusts

Bournaud, Frédéric, Powell, Leila C., Chapon, Damien, Teyssier, Romain

Journal:

Proceedings of the International Astronomical Union

Year:

2010

Language:

english

File:

PDF, 260 KB

english, 2010

6

Galactic star formation in parsec-scale resolution simulations

Powell, Leila C., Bournaud, Frederic, Chapon, Damien, Devriendt, Julien, Slyz, Adrianne, Teyssier, Romain

Journal:

Proceedings of the International Astronomical Union

Year:

2010

Language:

english

File:

PDF, 320 KB

english, 2010

7

Enhancing and inhibiting star formation: high-resolution simulation studies of the impact of cold accretion, mergers and feedback on individual massive galaxies

Powell, Leila C., Bournaud, Frederic, Chapon, Damien, Devriendt, Julien, Gaibler, Volker, Khochfar, Sadegh, Slyz, Adrianne, Teyssier, Romain

Journal:

Proceedings of the International Astronomical Union

Year:

2012

Language:

english

File:

PDF, 308 KB

english, 2012

8

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Advances in Resist Technology and Processing XXI - Evaluation of wet-developable KrF organic BARC to improve CD uniformity for implant application

Guilmeau, Isabelle D., Sturtevant, John L., Guerrero, Alice F., Blain, Vincent, Kremer, Stephanie, Vachellerie, Vincent, Lenoble, Damien, Nogueira, Patricia, Mougel, Sebastien, Chapon, Jean-Damien

Year:

2004

Language:

english

File:

PDF, 1.53 MB

english, 2004

9

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Data Analysis and Modeling for Process Control III - Design and use of multivariate approach error analysis APC system

de Caunes, Jean, Emami, Iraj, Tobin, Jr., Kenneth W., van Herk, Joost, Warrick, Scott, Le Gratiet, Bertrand, Mikolajczak, Marc, Chapon, Jean-Damien, Monget, Cedric, Gemmink, Jan-Willem

Year:

2006

Language:

english

File:

PDF, 306 KB

english, 2006

10

SPIE Proceedings [SPIE Photomask and Next Generation Lithography Mask Technology XII - Yokohama, Japan (Wednesday 13 April 2005)] Photomask and Next-Generation Lithography Mask Technology XII - Correction of long-range effects applied to the 65-nm node

Belledent, Jerome, Komuro, Masanori, Word, James, Trouiller, Yorick, Couderc, Christophe, Miramond, Corinne, Toublan, Olivier, Chapon, Jean-Damien, Baron, Stanislas, Borjon, Amandine, Foussadier, Fran

Year:

2005

Language:

english

File:

PDF, 480 KB

english, 2005

11

SPIE Proceedings [SPIE Photomask and Next-Generation Lithography Mask Technology XIV - Yokohama, Japan (Tuesday 17 April 2007)] Photomask and Next-Generation Lithography Mask Technology XIV - Characterization of inverse SRAF for active layer trenches on 45-nm node

Urbani, Jean-Christophe, Watanabe, Hidehiro, Chapon, Jean-Damien, Belledent, Jérôme, Borjon, Amandine, Couderc, Christophe, Di-Maria, Jean-Luc, Farys, Vincent, Foussadier, Franck, Gardin, Christian, K

Year:

2007

Language:

english

File:

PDF, 1.34 MB

english, 2007

12

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Optical Microlithography XXI - Improving lithography intra wafer CD for C045 implant layers using STI thickness feed forward?

Massin, Jean, Orlando, Bastien, Gatefait, Maxime, Chapon, Jean-Damien, Le-Gratiet, Bertrand, Minghetti, Blandine, Goirand, Pierre-Jérôme

Year:

2008

Language:

english

File:

PDF, 617 KB

english, 2008

13

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Advances in Resist Technology and Processing XXII - Comparison between organic spin-on BARC and carbon-containing CVD stack for 65-nm gate patterning

Chapon, Jean-Damien, Sturtevant, John L., Chaton, Catherine, Gouraud, Pascal, Broekaart, Marcel, Warrick, Scott, Guilmeau, Isabelle, Trouiller, Yorick, Belledent, Jerome

Year:

2005

Language:

english

File:

PDF, 343 KB

english, 2005

14

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Optical Microlithography XIX - Immersion lithography robustness for the C065 node

Warrick, Scott, Flagello, Donis G., Morton, Rob, Mauri, Andrea, Chapon, Jean-Damien, Belledent, Jerome, Conley, Will, Barr, Alex, Lucas, Kevin, Monget, Cedric, Plantier, Valerie, Cruau, David, Gomez,

Year:

2006

Language:

english

File:

PDF, 566 KB

english, 2006

15

[IEEE 2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC) - Portland, OR, USA (2016.6.5-2016.6.10)] 2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC) - Cross strategy of surface and volume characterizations of chalcogenides thin films: Practical case of CIGS absorbers

Loubat, Anais, Mollica, Fabien, Eypert, Celine, Bouttemy, Muriel, Aureau, Damien, Vigneron, Jackie, Gaiaschi, Sofia, Naghavi, Negar, Jubault, Marie, Donsanti, Frederique, Chapon, Patrick, Lincot, Dani

Year:

2016

Language:

english

File:

PDF, 393 KB

english, 2016

16

THE DRIVING MECHANISM OF STARBURSTS IN GALAXY MERGERS

Teyssier, Romain, Chapon, Damien, Bournaud, Frédéric

Journal:

The Astrophysical Journal

Year:

2010

Language:

english

File:

PDF, 673 KB

english, 2010

17

Cardiac Abnormalities in Type 1 Facioscapulohumeral Muscular Dystrophy

Labombarda, Fabien, Maurice, Maxime, Simon, Jean-Philippe, Legallois, Damien, Guyant-Maréchal, Lucie, Bedat-Millet, Anne-Laure, Merle, Philippe, Saloux, Eric, Chapon, Françoise, Milliez, Paul

Journal:

Journal of Clinical Neuromuscular Disease

Year:

2017

Language:

english

File:

PDF, 240 KB

english, 2017

18

HYDRODYNAMICS OF HIGH-REDSHIFT GALAXY COLLISIONS: FROM GAS-RICH DISKS TO DISPERSION-DOMINATED MERGERS AND COMPACT SPHEROIDS

Bournaud, Frédéric, Chapon, Damien, Teyssier, Romain, Powell, Leila C., Elmegreen, Bruce G., Elmegreen, Debra Meloy, Duc, Pierre-Alain, Contini, Thierry, Epinat, Benoit, Shapiro, Kristen L.

Journal:

The Astrophysical Journal

Year:

2011

Language:

english

File:

PDF, 1.84 MB

english, 2011

19

[IEEE 2017 IEEE 44th Photovoltaic Specialists Conference (PVSC) - Washington, DC, USA (2017.6.25-2017.6.30)] 2017 IEEE 44th Photovoltaic Specialist Conference (PVSC) - Cross strategy of surface and volume characterizations of chalcogenides thin films: Practical case of CIGS absorbers

Loubat, Anais, Mollica, Fabien, Eypert, Celine, Bouttemy, Muriel, Aureau, Damien, Vigneron, Jackie, Gaiaschi, Sofia, Naghavi, Negar, Jubault, Marie, Donsanti, Frederique, Chapon, Patrick, Lincot, Dani

Year:

2017

Language:

english

File:

PDF, 391 KB

english, 2017

20

[IEEE 2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC & 34th EU PVSEC) - Waikoloa Village, HI, USA (2018.6.10-2018.6.15)] 2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC & 34th EU PVSEC) - Coupling GD-OES and XPS profiling to perform advanced physico-chemical characterizations of III-V layers for photovoltaic applications

Loubat, Anais, Bechu, Solene, Bouttemy, Muriel, Eypert, Celine, Gaiaschi, Sofia, Fregnaux, Mathieu, Aureau, Damien, Vigneron, Jackie, Simon, Nathalie, Chapon, Patrick, Goncalves, Anne-Marie, Etcheberr

Year:

2018

Language:

english

File:

PDF, 203 KB

english, 2018

21

[IEEE 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC) - Chicago, IL, USA (2019.6.16-2019.6.21)] 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC) - Cross-characterization methods to obtain an âabsoluteâ quantification of Cu(In,Ga)Se 2 in-depth and at the surface

Bechu, Solene, Marciano, Jocelyne, Chapon, Patrick, Etcheberry, Arnaud, Bouttemy, Muriel, Loubat, Anais, Vigneron, Jackie, Aureau, Damien, Fregnaux, Mathieu, Theys, Bertrand, Jomard, Francois, Gaiasch

Year:

2019

File:

PDF, 3.20 MB

2019